Fabrication of SnS thin film by rapid thermal processing: effect of annealing temperature in sulfurization process
نویسندگان
چکیده
In this study, the effect of sulfurization temperature on properties SnS thin films was investigated. The were fabricated by two-stage method includes deposition magnetron sputtering using a single target, followed annealing/sulfurization treatment in Rapid Thermal Processing (RTP) system at 225, 300 and 375 °C temperatures. Several characterization techniques such as XRD, Raman spectroscopy, EDX, optical transmission Van der Pauw used for analyses films. EDX showed that all samples had almost stoichiometric (S/Sn~1) chemical composition. However, amount sulfur increased slightly increased. XRD pattern exhibited constitution orthorhombic structure regardless annealing temperature. SnS2 secondary phase observed addition to sample annealed highest reaction (375°C). spectroscopy measurements verified structure. band gap distinction from 1.42 1.81 eV regarding electrical most promising film sulfurized 300°C resistivity charge carrier concentration values 1.07x104 Ω.cm 1.70x1014 cm-3, respectively. Based characterizations, it can be deduced more outstanding structural potential solar cell applications.
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ژورنال
عنوان ژورنال: Gümü?hane üniversitesi fen bilimleri enstitüsü dergisi
سال: 2022
ISSN: ['2146-538X']
DOI: https://doi.org/10.17714/gumusfenbil.1006581